HD-113
ITO Etchant
HD-113 is an exclusive etchant of ITO which forms desired patterns on wafer, and it minimizes damage to photo resist. HD-113 improves undercut phenomenon in process, and the product is applicable not only in semiconductor field, but also for smartphone components, etc.
[Features]
• Forms patterns minimizing damage to photo resist
• Forms high quality patterns without excessive corrosion of metal
• After etching, no residue of metal or foreign substances left on the surface
[ Properties and method ]
| Concentration | Original/undiluted | Method | Dipping, ultrasonic |
|---|---|---|---|
| Temp. | Room temp. ~ 50 ℃ | Packing | 20kg (pail) / 200kg (drum) |
| pH | 1.0 ± 0.5 | Application | ITO etchant |
[ Before and after wafer ITO etching ]
| Before etching | After etching |
|---|---|
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